Add thermal silicon oxidation models - #230
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New process models: - IonImplantation: wraps csImplant as a psProcess with zero duration; supports Pearson IV and Gaussian profiles, tilt angle, dose control, mask/screen materials, damage field, and optional embedded boundary reconstruction for sub-grid surface offsets on tilted interfaces - Anneal: thermal anneal solver driven by csAnneal; Arrhenius diffusivity, solid solubility capping, I/V defect coupling, transient enhanced diffusion (TED), arbitrary temperature schedules Supporting additions: - psImplantProfile, psImplantPearson, psImplantTable, psImplantDamage, psImplantParams, psImplantConstants, psImplantSetup - psAnneal, psAnnealParams, psAnnealSetup - psModelDb / psModelDbLookup / psModelNames for table-driven profile lookup - psUnits: physical unit helpers Changes to existing files: - psDomain: add withEmbeddedBoundaries parameter to generateCellSet() - psProcess: defer AUTO flux-engine resolution to apply() so callback-only and geometric models never enter the flux engine code path - viennaps.hpp: include new headers; CMakeLists.txt: install them Tests: anneal, implantProfile, ionImplant (includes embedded boundary depth test) Example: ionImplantation Co-Authored-By: Claude Sonnet 4.6 <noreply@anthropic.com>
… geometry templates
…branch, add GPU install for ViennaLS
…mp version to 4.6.0
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Adds thermal silicon oxidation simulation to ViennaPS via the new
Oxidationprocess model, which wraps the coupled diffusion–deformation engine from ViennaLS.New process model
Oxidation<T,D>: thermal Si oxidation based on the Deal-Grove model. Inputs: temperature (°C), time (hours), oxidant type (dry/wet), pressure, and crystal orientation (Si100,Si110,Si111,PolySi). Uses a built-in Arrhenius table for standard 1 atm low-doping silicon. Automatically seeds a native-oxide layer if no SiO2 level set is present. Exposes GPU BiCGSTAB acceleration, LOCOS mask-contact mode, and full solver tolerance/iteration control.New examples
Each example ships with C++ and Python versions,
config.txt, andREADME.finOxidationstepOxidationtrenchOxidationlocosOxidationPython bindings
New types exposed:
Oxidation,OxidantType,SiliconOrientation. Stubs updated for 2D and 3D.Tests
New test suite under
tests/oxidation/covering dry/wet Arrhenius rates and Si orientation ratios.Infrastructure
lsOxidation,lsOxidationDiffusion,lsOxidationDeformation)VIENNALS_USE_GPU=ONfor GPU-accelerated BiCGSTAB